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US 2006/0187428 A1Published application
Lithographic apparatus and device manufacturing method
AssigneeASML Netherlands B.V.
InventorsArno Bleeker, Dominicus Adrianus Franken, Martinus Hendricus Hoeks, Lambertus Kessels, Tobrjorn Sandstrom
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Abstract
A lithographic apparatus provided with an array of individually controllable elements that is detachably mounted to mounting points on a support frame of the lithographic apparatus.
Claims31
A lithographic apparatus, comprising:
- a support frame having a mounting point;
- and
- an array of individually controllable elements that is used to modulate a beam of radiation, wherein the array of individually controllable elements is detachably mounted to the mounting point on the support frame.
A lithographic system, comprising:
- a lithographic apparatus including a support frame having a mounting point;
- and
- an array of individually controllable elements that modulates a beam of radiation and that is detachably mounted to the mounting point on the support frame.
A device manufacturing method, comprising:
- mounting an array of individually controllable elements to a mounting point on a support frame, the mounting point detachably receiving the array of individually controllable elements;
- modulating a beam of radiation using the array of individually controllable elements;
- and
- projecting the modulated beam of radiation onto a substrate.
1 more element
A method of preparing a lithographic apparatus for use, comprising:
- providing a support frame;
- and
- detachably mounting an array of individually controllable elements to a mounting point on the support frame of the lithographic apparatus.
Dependencies are inferred from the claim text.