Light blocking electrical interconnect
AssigneeHewlett-Packard Development Company, L.P.
InventorEric Martin
Life of this patent
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Abstract
An electrical interconnect to block light for use with an array of micro electromechanical machines separated by the first breaks includes a layer of an electrically conductive and an electrically isolated portions separated by second breaks configured to cross the first breaks on multiple sides of one of the micro electromechanical machines.
Claims53
An electronic device comprising:
- a first member;
- a second member, an electrical interconnect layer having a first electrically conductive portion and a second electrically conductive portion electrically isolated from the first electrically conductive portion;
- a conductive plate between the electrical interconnect layer and the first and second members, the conductive plate having a periphery outwardly beyond the first member, wherein the conductive plate is configured to be charged from the periphery;
- a first charge transmitting flexure extending from the first portion to the first member;
- and
- a second charge transmitting flexure extending from the second portion to the second member.
A device comprising:
- a circuitry layer;
- a movable member;
- a conductive layer between the circuitry and the movable member;
- a conductive plate between the movable member and the conductive layer;
- a first charge transmitting flexure extending from the conductive layer to the movable member;
- and
- a second charge transmitting flexure extending from the conductive layer to the movable member.
A light modulator comprising:
- a pixel plate;
- a circuitry layer;
- a conductive plate between the circuitry layer and the pixel plate;
- and
- means spanning the pixel plate for transmitting electrical charge from the circuit layer to the pixel plate.
A method of actuating a light modulator, the method comprising:
- charging a conductive plate spanning pixel plates on a first side of the conductive plate from a periphery of the conductive plate;
- and
- charging the pixel plates to distinct voltages via distinct electrical isolated portions of a conductive electrical interconnect layer on a second side of the conductive plate.
A method of transmitting charge to micro electromechanical machine devices that are separated by first breaks and of blocking light passing through the first breaks to control circuitry, the method comprising:
- transmitting electrical charge to the micro electromechanical machines via a layer of electrically conductive and electrically isolated portions extending between micro electromechanical machines and the circuitry layer, wherein the portions are separated by second breaks configured to cross the first breaks on multiple sides of the micro electro-mechanical machines.
A method of fabricating an electronic device having an array of micro electromechanical machines having boundaries, the method comprising:
- forming a circuitry layer;
- forming an electrically conductive electrical interconnect layer having electrically conductive and electrically isolated portions electrically connected to the circuitry layer and separated by breaks configured to cross the boundaries of one of the micro electromechanical machines on multiple sides of the micro electromechanical machine.
An electrical interconnect to block light for use with an array of micro electromechanical machines separated by first breaks, the interconnect comprising:
- a layer of electrically conductive and electrically isolated portions separated by second breaks configured to cross the first breaks on multiple sides of one of the micro electromechanical machines.
An electrical device, comprising:
- a MEMs structure;
- electrical circuitry disposed under the mems structure;
- and
- a set of light blocking electrical interconnect layers disposed between the electrical circuitry and the MEMs structure, wherein the light blocking electrical interconnect layers have openings configured to cause incident light that passes from the MEMs structure to travel through indirect paths and be significantly attenuated before reaching the electrical circuitry.
Dependencies are inferred from the claim text.