Electric heater with resistive carbon heating elements
OwnerMark Campello, Derek Pietzinventors
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Abstract
A heater, such as a susceptor for use in electronics industry manufacturing processes, and a method for manufacture of such a heater. A resistance heating assembly includes a carbon fiber reinforced carbon conductor and the heating element is free to move slightly relative to an outer casing in response to differences between the coefficients of thermal expansion of the resistance heating element and the outer casing. A resistance heating element of carbon is potted to protect against oxidation. A slip layer of a powdered ceramic allows movement of the heating element relative to a housing.
Claims36
A heater, comprising:
- (a) a housing including an exterior heating surface and an interior cavity;
- (b) an electrical heating unit contained within said cavity and electrically insulated from said housing, said heating unit including a resistance heating element and an electrical terminal connected electrically to said resistance heating element;
- and
- (c) a slip layer of material located between said heating element and an interior surface of said cavity, said slip layer allowing said heating element to move with respect to said housing in response to a change in temperature of at least one of said housing and said heating element.
A heater operable at an operating temperature of at least 500° C., comprising:
- (a) a housing including an exterior heating surface;
- (b) an electrical heating unit contained within and electrically insulated from said housing, said heating unit including a resistance heating element consisting substantially of conductive carbon and an electrical terminal connected to a terminal portion of said heating element;
- and wherein
- (c) said heating element is embedded in an electrically insulative potting material able to withstand said operating temperature.
A method of assembling a heater, comprising:
- (a) providing an outer housing member defining a cavity;
- (b) coating an interior surface of the outer housing member with a quantity of a material, thereby forming a slip layer;
- (c) installing a first sheet of electrically insulating material adjacent said slip layer;
- (d) installing a resistance heating element including a conductor of carbon and associated electrical leads into the cavity;
- (e) thereafter installing an additional sheet of electrically insulating material adjacent to said heating element;
- (f) coating an interior surface of a cover plate with a quantity of said material, thereby forming a slip layer;
- (g) thereafter installing said cover plate and fastening said cover plate to said outer housing member, thereby closing said cavity.
An electrical resistance heater capable of raising a temperature of a heating surface at least 10° C. per minute from a temperature of 20° C. to 500° C. and capable of being operated continuously to maintain said heating surface at 500° C. thereafter.
Dependencies are inferred from the claim text.