Substrate cleaning apparatus
OwnerYoshiharu Yamamotoinventor
Life of this patent
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Abstract
An inexpensive cleaning apparatus capable of exerting cleaning power on a side surface of a substrate at the same level as on a main surface thereof, and capable of changing an angle of a jetting device during cleaning without so changing a jet distance. The apparatus 1 comprise a table 10 for rotatably horizontally supporting the substrate 70, a jetting device 30 for jetting cleaning fluid onto the substrate, an arm 16 holding the device at the first end, and a shaft 17 holding the second end of the arm rotatably around a horizontal axis for guiding the arm in a horizontal direction, and is characterized in that the first end of the arm is positioned apart from an axis line of the second end when seen through the axis line of the second end.
Claims4
An apparatus for cleaning a substrate, comprising:
- a table for rotatably horizontally supporting a substrate;
- a jetting device for jetting cleaning fluid onto the substrate;
- an arm having a first and a second end and holding the jetting device at the first end, the first end being placed in a position apart from an axis line of the second end when seen through the axis line of the second end;
- and
- a guide holding the second end of the arm rotatably around a horizontal axis for guiding the arm in a direction parallel with the table.
A method of jetting cleaning fluid from a jetting device, while rotating a substrate, to clean the substrate, the method comprising:
- providing an arm having a first and a second end and holding the jetting device at the first end, the first end being placed in a position apart from an axis line of the second end when seen through the axis line of the second end, and a guide holding the second end of the arm rotatably around a horizontal axis and guiding the arm in a horizontal direction;
- and
- rotating the arm to make the angle of the jetting device different between when the main surface of the substrate is to be cleaned and when the side surface thereof is to be cleaned.
Dependencies are inferred from the claim text.