Multi-zone chuck
AssigneeLSI Logic Corporation
InventorRobert Donis
Life of this patent
Estimating the term…
Abstract
A multi-zone electrical chuck (100) comprises at least two electrically distinct zones or regions. Each zone is electrically isolated from each other zone, and each zone is capable of being set to a different voltage. During semiconductor manufacturing, voltages may be applied to the zones to affect the growth of films onto the surface of a substrate residing on the chuck.
Claims24
A chuck system for holding a substrate comprising:
- a first zone;
- a second zone electrically insulated from the first zone;
- and
- a voltage controller to control a first voltage applied to the first zone and a second voltage applied to the second zone during a deposition process.
A chuck system for holding a substrate comprising:
- a plurality of electrically conductive zone wherein each zone is electrically insulated from each other zone;
- and
- a voltage controller to control a voltage applied to each of the plurality of zones during a deposition process.
A method for affecting growth on a substrate, the method comprising:
- applying a first voltage to a first zone of a chuck;
- and
- applying a second voltage to a second zone of the chuck.
A method for affecting film growth on a substrate, the method comprising:
- placing the substrate on a chuck, said chuck comprising a plurality of zone, said zones being electrically insulated from each other;
- and
- applying a voltage to one of the plurality of zones.
A chuck system for holding a substrate comprising:
- a plurality of electrically conductive zone wherein each zone is electrically insulated from each other zone;
- and
- means for controlling a voltage applied to each of the plurality of zones during a deposition process.
Dependencies are inferred from the claim text.