Film precursor tray for use in a film precursor evaporation system and method of using

A replaceable film precursor support assembly comprising:

• a replaceable tray configured to support a film precursor, and configured to be stacked with one or more additional stackable trays in a film precursor evaporation system comprising a container having an outer wall and a bottom, and a lid configured to be sealably coupled to said container, said lid comprising an outlet configured to be sealably coupled to a thin film deposition system,
• said replaceable tray comprising an inner edge and an outer edge configured to retain said film precursor therebetween, one of said edges being stackable, said replaceable tray including one or more tray openings formed in said stackable edge, and configured to flow a carrier gas from a carrier gas supply system, over said film precursor towards the other edge of the tray and exhaust through said outlet in said lid with film precursor vapor.