Device for cleaning the surface of a component
AssigneeCommissariat a l'Energie Atomique
InventorsJean Hue, Etienne Quesnel, Florian Evers
Life of this patent
Estimating the term…
Abstract
A detached particle capture means by laser (4) allows them to be attracted and prevented from dropping back better than a traditional blow-off flushing means would. Various categories of attractive forces may be implemented. It will also be possible to use a particle destruction means, like a second high-power laser above the worked surface (3).
Claims11
Device for cleaning a surface (3) of a component, particularly an optical or electronic component, by a laser directed towards said surface, characterized in that it includes, placed in front of the surface, a means of capturing particles detached from the surface which includes a structure polarized relative to the component, characterized in that the structure comprises at least one pointer pointed towards the surface.
Device for cleaning a surface (3) of a component, particularly an optical or electronic component, by a laser directed towards said surface, including, placed in front of the surface, a means for destroying particles detached from the surface.
Dependencies are inferred from the claim text.