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US 2006/0153715 A1Published application
Vacuum pumping system and method of operating a vacuum pumping arrangement
AssigneeEdwards Limited
InventorNigel Schofield
Life of this patent
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Abstract
A vacuum pumping system comprises a vacuum pumping arrangement comprising: a drive shaft; a motor for driving said drive shaft; a molecular pumping mechanism comprising turbomolecular pumping means; and a backing pumping mechanism. The drive shaft drives said molecular pumping mechanism and said backing pumping mechanism. The system also comprises evacuation means, such as a load lock pump, for evacuating at least, said turbomolecular pumping means.
Claims17
A vacuum pumping system having a vacuum pumping arrangement comprising:
- a drive shaft;
- a motor for driving the drive shaft;
- a molecular pumping mechanism comprising turbomolecular pumping means;
- a backing pumping mechanism, wherein the drive shaft is for driving the molecular pumping mechanism and the backing pumping mechanism;
- and
- an evacuation means for evacuating at least the turbomolecular pumping means.
3 more elements
A method of operating a vacuum pumping arrangement having a drive shaft;
- a motor for driving the drive shaft;
- a molecular pumping mechanism having turbomolecular pumping means;
- and a backing pumping mechanism, wherein the drive shaft is for driving the molecular pumping mechanism and the backing pumping mechanism, the method comprising the step of operating an evacuation means connected to the arrangement to evacuate the turbomolecular pumping means to a predetermined pressure;
- and operating the motor to start rotation of the drive shaft.
1 more element
Dependencies are inferred from the claim text.