Vertically separated acoustic filters and resonators
AssigneeAvago Technologies Wireless IP (Singapore) Pte. Ltd.
InventorsRichard Ruby, John Larson
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Abstract
An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.
Claims20
An apparatus comprising:
- a first acoustic resonator on a substrate;
- a second acoustic resonator above said first acoustic resonator, said second acoustic resonator vertically separated from said first acoustic resonator such that little or no acoustic energy is coupled between said first acoustic resonator and said second acoustic resonator;
- and
- wherein said second acoustic resonator is supported by standoffs fabricated between said first acoustic resonator and said second acoustic resonator.
An apparatus comprising a plurality of resonators fabricated on a substrate, the apparatus including a first acoustic resonator and a second acoustic resonator vertically separated above said first acoustic resonator, said second acoustic resonator acoustically separated from said first acoustic resonator by at least one standoff fabricated in contact with said first resonator and said second resonator.
Dependencies are inferred from the claim text.