Methodology of chemical mechanical nanogrinding for ultra precision finishing of workpieces
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsHung-Chin Guthrie, Ming Jiang
Life of this patent
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Abstract
Abstract of the Disclosure A chemical-mechanical nanogrinding process achieves near-zero pole tip recession (PTR) to minimize magnetic space loss of the head transducer to media spacing loss, alumina recession trailing edge profile variation, and smooth surface finish with minimal smearing across multi-layers of thin films and the hard substrate to meet the requirements of high areal density head. With a fine chemical mechanical nanogrinding process, PTR can be improved to a mean of about less than 1.0 nm.
Claims22
(currently amended) A method of treating a surface of a workpiece, comprising:
- (a) providing a workpiece having a first material and a second material that differs from the first material;
- (b) lapping the workpiece with a lapping substrate and an abrasive slurry between the workpiece and the lapping substrate such that portions of the first material and the second material are mechanically removed from the workpiece;
- (c) nanogrinding the workpiece with a nanogrinding substrate and a nonabrasive solution, the nanogrinding substrate having an abrasive embedded in a surface thereof that mechanically removes additional portions of the first material and the second material from the workpiece;
- and
- (d) selectively chemically mechanical removing an additional portion of the second material from the workpiece with the nonabrasive chemical solution.
(currently amended) A method of finishing a surface of a slider for a hard disk drive, comprising:
- (a) providing a slider having a metal and a ceramic that differs from the metal;
- (b) lapping the slider with a lapping substrate and an abrasive slurry between the slider and the lapping substrate such that portions of the metal and the ceramic are mechanically removed from the slider;
- (c) nanogrinding the slider with a nanogrinding substrate and a nonabrasive solution, the nanogrinding substrate having an abrasive embedded in a surface thereof that mechanically removes additional portions of the metal and the ceramic from the slider;
- and
- (d) selectively chemically mechanical removing an additional portion of the ceramic from the slider with the nonabrasive chemical solution, such that the slider defines a plane, and both the metal and ceramic are removed from the slider to within about one nanometer of the plane.
Dependencies are inferred from the claim text.