Process for preparing a dielectric interlayer film containing silicon beta zeolite
OwnerHayim Abrevaya, Richard Willis +1inventors
InventorsHayim Abrevaya, Richard Willis, Stephen Wilson
Life of this patent
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Abstract
A process for forming a zeolite beta dielectric layer onto a substrate such as a silicon wafer has been developed. The zeolite beta is characterized in that it has a Si/Al of at least 25 and has crystallites from about 5 to about 40 nanometers. The process involves first dealuminating a starting zeolite beta, then preparing a slurry of the dealuminated zeolite beta followed by coating a substrate, e.g. silicon wafer with the slurry, heating to form a zeolite beta film and treating the zeolite beta with a silylating agent.
Claims22
A process for depositing a zeolite beta dielectric layer onto a substrate comprising dealuminating a starting zeolite beta at dealumination conditions to provide a dealuminated zeolite beta having a Si/Al molar ratio of greater than about 25 and comprising crystals having an average diameter of about 5 to about 40 nano-meters;
- slurrying the dealuminated zeolite beta in a solvent selected from the group consisting of polar organics, water, polyols and mixtures thereof to form a slurry;
- coating the substrate with the slurry and heating the coated substrate to evaporate the solvent and form a zeolite beta film on the substrate;
- treating the zeolite beta with a silylating agent at silylation condition to substantially reduce the terminal hydroxyl groups on the zeolite;
- and where the substrate comprises a silicon wafer which is part of an integrated circuit.
A process for preparing a nano-crystalline zeolite beta composition having a Si/Al molar ratio of at least 25 comprising providing a starting zeolite beta having a composition on an as synthesized and anhydrous basis expressed by an empirical formula of:
- Mmn+Rrp+AlxSiOz
- where M is at least one exchangeable cation selected from the group consisting of alkali and alkaline earth metals, R is an organic cation selected from the group consisting of tetraethylammonium ion, dibenzyl-dimethylammonium ion, dibenzyl-1,4-diazo-bicyclo[2.2.2]octane, diethanol amine and mixtures thereof, “n” is the mole fraction of M and has a value from 0 to about 0.125, “n” is the weighted average valence of M and has a value of about 1 to about 2, “r” is the mole fraction of R and has a value of about 0.1 to about 0.5, “p” is the weighted average valence of R and has a value of about 1 to about 2, “x” is the mole fraction of Al and has a value from about 0.01 to about 0.25 and “z” is the mole fraction of O and has a value from about 2.02 to about 2.25 and characterized in that it comprises having an average diameter of about 5 to about 40 nano-meters;
- dealuminating the starting zeolite beta at dealumination conditions thereby removing at least a fraction of the aluminum atoms from the framework and provide a nano-crystalline zeolite beta having a Si/Al molar ratio of at least 25.
Dependencies are inferred from the claim text.