Slit coater having apparatus for supplying a coating solution
AssigneesLG. Philips LCD Co., Ltd., K.C. Tech Co., Ltd.
InventorsO Kwon, Kang Cho
Life of this patent
Estimating the term…
Abstract
A slit coater including an apparatus for supplying coating solution by a coating method using a slit nozzle, which is configured to minimize contamination of coating solution, utilizing a filtering function, and supplying a controlled amount of photosensitive solution to a slit nozzle. The slit coater further includes a table on which an object to be processed is mounted, a slit nozzle unit that applies coating solution onto a surface of the object to be processed, and a coating solution supply apparatus including a storage tank that stores the coating solution, a pump that supplies the coating solution stored in the storage tank to the slit nozzle unit, and a buffer tank that is in fluid communication with the pump and the storage tank.
Claims40
A slit coater comprising:
- a table on which an object to be processed is mounted;
- a slit nozzle unit configured to apply a coating solution onto a surface of the object;
- and
- a coating solution supply apparatus including a storage tank configured to store the coating solution, a pump that supplies the coating solution stored in the storage tank to the slit nozzle unit, and a sealed buffer tank in fluid communication with the pump and the storage tank, wherein the supply apparatus is configured to substantially uniformly maintain pump pressure and to remove air bubbles from the coating solution.
A method for fabricating an LCD device comprising:
- supplying a coating solution from a storage tank to a sealed buffer tank in fluid communication with a pump;
- supplying a substantially uniform amount of coating solution at a substantially uniform pressure from the sealed buffer tank to a slit nozzle unit;
- and
- applying the coating solution onto a surface of an LCD substrate using the slit nozzle unit.
A method for fabricating an LCD device using a slit coater, the method comprising:
- providing a table on which an LCD substrate is mounted;
- and
- applying a coating solution onto the substrate using a slit nozzle,
- wherein the coating solution is supplied to the slit nozzle by a coating solution supply apparatus including a storage tank configured to store the coating solution, a pump that supplies the coating solution stored in the storage tank to the slit nozzle unit, and a sealed buffer tank in fluid communication with the pump and the storage tank, wherein the supply apparatus is configured to substantially uniformly maintain pump pressure and to remove air bubbles from the coating solution.
A method for coating a resist layer for fabricating an LCD device using a coating system, the method comprising:
- providing a slit nozzle unit configured to apply a coating solution onto an LCD substrate;
- providing a coating solution storage tank;
- providing a coating solution supply system that includes a pump;
- providing a sealed buffer tank in fluid communication with the pump and the storage tank,
- wherein the coating solution supply system is configured to supply a substantially uniform amount of coating solution at a substantially uniform pressure from the buffer tank to the slit nozzle unit;
- and
- applying the coating solution to the LCD substrate.
Dependencies are inferred from the claim text.