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US 2006/0139843 A1Published application
Light exposure apparatus
AssigneeLG.Philips LCD Co., Ltd.
InventorYeong-Hawn Kim
Life of this patent
Estimating the term…
Abstract
A light exposure apparatus includes a chuck adapted to receive a substrate on a surface thereof, a plurality of first lift pins in the chuck that are able to move up and down to load/unload the substrate on/from the chuck, and a plurality of second lift pins in the chuck to discharge electrostatic charges of the chuck and the substrate.
Claims20
A light exposure apparatus for fabricating a substrate of a liquid crystal panel, comprising:
- a chuck adapted to receive the substrate of the liquid crystal panel on a surface of the chuck;
- a plurality of first lift pins in the chuck that are able to move up and down to load/unload the substrate on/from the surface of the chuck;
- and
- a plurality of second lift pins in the chuck to discharge electrostatic charges of the chuck and the substrate.
1 more element
An apparatus for fabricating a substrate, comprising:
- a chuck adapted to receive the substrate on a surface thereof;
- a plurality of first lift pins in the chuck to move up and down to load/unload the substrate on/from the surface of the chuck;
- and
- a plurality of second lift pins in the chuck to discharge electrostatic charges of the chuck and the substrate.
1 more element
A light exposure apparatus for fabricating a substrate of a liquid crystal panel, comprising:
- a light source adapted to emit ultra-violet light;
- a photo mask including predetermined patterns that selectively transmit and block the light emitted from the light source;
- a chuck adapted to support the substrate that is exposed to the light through the photo mask;
- and
- a plurality of first lift pins in the chuck that are able to move up and down to load/unload the substrate on/from the chuck,
- wherein the chuck is provided with a mechanism to reduce a burden of the plurality of first lift pins and to discharge electrostatic charges of the chuck and the substrate.
3 more elements
Dependencies are inferred from the claim text.