Optical element holding device, lens barrel, exposing device, and device producing method
AssigneeNikon Corporation
InventorYuichi Shibazaki
Life of this patent
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Abstract
A frame member of an optical element holding device integrally includes an inner ring, an outer ring, six arms, and a lever connected to each arm. Each arm is rotatably connected to the inner ring and the lever. The lever is rotatable with respect to the outer ring. The orientation of the inner ring and the orientation of the optical element are adjusted in according with the displacement of the lever caused by a displacement module.
Claims29
An optical element holding device comprising:
- a frame member;
- a holding member which is provided at an inner side of the frame member and holds an optical element;
- and
- an orientation adjustment mechanism which is provided between the frame member and the holding member and adjusts orientation of the optical element with respect to the frame member with six degrees of freedom by moving the holding member.
An optical element holding device comprising:
- a frame member;
- a holding member which is provided at an inner side of the frame member and holds an optical element;
- a displacement member which is provided in the frame member and displaces in a first displacement direction by a first displacement amount;
- and
- a link mechanism which is provided between the frame member and the holding member and displaces in a second displacement direction, which intersects the first displacement direction, by a second displacement amount, which is less than the first displacement amount, when the displacement member displaces.
An optical element holding device for enabling fine adjustment of a position of an optical element having an optical axis and orientation of the optical axis, the optical element holding device comprising:
- an inner ring portion which supports the optical element;
- an outer ring portion located on the outer side of the inner ring portion;
- and
- at least three link mechanisms provided between the inner ring portion and the outer ring portion and connect the inner ring portion and the outer ring portion, wherein the at least three link mechanism are displaceable so as to allow the inner ring portion to move with respect to the outer ring portion with six degrees of freedom, the inner ring portion, the outer ring, and the at least three link mechanism being integrally formed as a single rigid body;
- and
- an adjustment mechanism which is attached to the outer ring and adjusts displacement amount of each link mechanism.
Dependencies are inferred from the claim text.