Software mechanism for generating flexible equipment state model views, software mechanism for measuring equipment reliability
AssigneeASML Netherlands B.V.
InventorsHarm Rossing, Marco Franssen, Camiel Rouweler
Life of this patent
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Abstract
A state model engine according to one embodiment is configured to dynamically determine Reliability, Availability, and Maintainability data in a lithographic processing system. The engine evaluates whether state changes occur in defined state models, based on transition events published by other state models.
Claims19
A method of controlling a lithographic processing machine, said method comprising:
- based on occurrence of a trigger event, recording a transition of a first state model of the machine;
- based on a transition event corresponding to the transition, updating a second state model of the machine.
A computer product having machine executable instructions, said instruction executable by a machine to perform a method of controlling a lithographic processing machine, the method comprising:
- based on occurrence of a trigger event, recording a transition of a first state model of the machine;
- based on a transition event corresponding to the transition, updating a second state model of the machine.
A system monitor configured to control a lithographic processing machine, the system monitor comprising:
- a processor configured to record a transition of a first state of the machine based on occurrence of a trigger event, and to update a second state model of the machine based on a transition event corresponding to the transition.
Dependencies are inferred from the claim text.