Lithographic apparatus and device manufacturing method
AssigneeASML Netherlands B.V.
InventorsMarc Maria Van Der Wijst, Dominicus Jacobus Franken, Erik Loopstra, Marius Ravensbergen
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Abstract
A lithographic apparatus is disclosed having a deformable lens element through which a patterned radiation beam is arranged to pass before reaching a substrate and having a deformable lens actuator configured to transmit a combination of a force substantially parallel to the optical axis of the projection system and a localized torque about an axis substantially perpendicular to the optical axis independently at a plurality of sub-regions on the deformable lens element.
Claims29
A lithographic apparatus, comprising:
- a projection system configured to project a patterned radiation beam onto a target portion of a substrate;
- a deformable lens element through which the patterned radiation beam is arranged to pass before reaching the substrate;
- and
- a deformable lens actuator configured to control the shape of the deformable lens element, the deformable lens actuator configured to transmit a combination of a force substantially parallel to the optical axis of the projection system and a localized torque about an axis substantially perpendicular to the optical axis independently at a plurality of sub-regions on the deformable lens element.
A lithographic apparatus, comprising:
- a projection system configured to project a patterned radiation beam onto a target portion of a substrate;
- a deformable lens element through which the patterned radiation beam is arranged to pass before reaching the substrate;
- a plurality of magnetic dipoles connected to the deformable lens element and oriented substantially tangentially with respect thereto so as to form a path of alternating north and south poles;
- and
- a plurality of magnetic actuators configured to interact with one or more magnetic dipoles of the plurality of magnetic dipoles so as to apply one or more of a tangential bending moment, a radial bending moment, a force with a component substantially parallel to the optical axis of the projection system, or any combination thereof, to a portion of the deformable lens element and thereby change the shape of the deformable lens element.
A device manufacturing method, comprising:
- controlling a shape of a deformable lens element by transmitting a combination of a force substantially parallel to the optical axis of the deformable lens element and a localized torque about an axis substantially perpendicular to the optical axis independently at a plurality of sub-regions on the deformable lens element;
- and
- projecting a patterned radiation beam through the deformable lens element onto a target portion of a substrate.
A device manufacturing method, comprising:
- changing the shape of a deformable lens element by using a plurality of magnetic actuators interacting with one or more magnetic dipoles of a plurality of magnetic dipoles so as to apply a tangential bending moment, a radial bending moment, a force with a component substantially parallel to the optical axis of deformable lens element, or any combination thereof, to a portion of the deformable lens element, the plurality of magnetic dipoles connected to the deformable lens element and oriented substantially tangentially with respect thereto so as to form a path of alternating north and south poles;
- and
- projecting a patterned radiation beam through the deformable lens element onto a target portion of a substrate.
Dependencies are inferred from the claim text.