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US 2006/0139456 A1Published application
Device for and a method measuring sizes on photomasks
OwnerArkady Nikitininventor
Life of this patent
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Abstract
A device for measuring sizes on photomasks has a television optical microscope, a system of periodical changing a resolution of the microscope, a regulated source of a base voltage, a comparator of a base signal and a television signal, and a former of short pulses, and a display unit.
Claims12
A device for measuring sizes on photomasks, comprising a television optical microscope;
- a system of periodically changing a resolution of the microscope;
- a regulated source of a base voltage;
- a comparator of a base signal and a television signal;
- a former of short pulses;
- and a display unit.
2 more elements
A method of measuring sizes of photomasks, comprising the steps of providing a television optical microscope;
- periodically changing a resolution of the microscope;
- regulating a source of a base voltage;
- comparing a base signal and a television signal;
- forming short pulses;
- and displaying on a display unit.
2 more elements
Dependencies are inferred from the claim text.