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US 2006/0138589 A1Published application
Semiconductor device with a fuse part and method of manufacturing the same
AssigneeDongbuAnam Semiconductor Inc.
InventorSe-Yeul Bae
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Abstract
The present invention provides a semiconductor device with a fuse part and a method of forming the same. The method includes forming a selective metal layer on a via hole which is connected to a metal line in a semiconductor device, forming a fuse metal layer on the selective metal layer, and forming a fuse metal layer pattern by using a photosensitive layer pattern which is formed on the fuse metal layer.
Claims17
A method of forming a fuse part in a semiconductor device, comprising:
- forming a selective metal layer on a via hole which is connected to a metal line in a semiconductor device;
- forming a fuse metal layer on the selective metal layer;
- and
- forming a fuse metal layer pattern by using a photosensitive layer pattern which is formed on the fuse metal layer.
1 more element
A method of forming a fuse part in a semiconductor device, comprising:
- forming a first insulation layer on a metal line in a semiconductor device;
- forming a first photosensitive layer pattern on the first insulation layer in order to form a fuse part;
- etching the first insulation layer by using the first photosensitive layer pattern to a degree that the metal line is exposed;
- selectively forming a selective metal layer on the exposed metal line;
- forming a fuse metal layer on the selective metal layer;
- forming a fuse metal layer pattern by using a second photosensitive layer pattern which is formed on the fuse metal layer;
- and
- forming a second metal insulation layer on the fuse metal layer pattern.
5 more elements
A semiconductor device with a fuse part, comprising:
- a via hole which is connected to a metal line and composed of a metal material;
- a selective metal layer which is contacted with the via hole;
- and
- a fuse metal layer which is contacted with the selective metal layer so as to interconnect adjacent selective metal layers.
1 more element
Dependencies are inferred from the claim text.