Substrate processing apparatus and transfer positioning method thereof
AssigneeTokyo Electron Limited
InventorKeisuke Kondoh
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Abstract
A substrate processing apparatus has a transfer mechanism arranged on a transfer base and configured to transfer a processing substrate between predetermined transfer positions, a mapping sensor arranged on the transfer base and configured to detect an arrangement state of a processing substrate inside a processing substrate accommodating case which accommodates a plurality of processing substrate in a shelf-like form, and a Z-axis teaching jig provided on or in the vicinity of one of the transfer positions. This substrate processing apparatus detects, by the mapping sensor, a height of the Z-axis teaching jig so as to perform teaching of Z-axis to the transfer mechanism with respect to the one of the transfer positions.
Claims8
A substrate processing apparatus, comprising:
- a transfer mechanism arranged on a transfer base and configured to transfer a processing substrate between predetermined transfer positions;
- a mapping sensor arranged on the transfer base and configured to detect an arrangement state of a processing substrate inside a processing substrate accommodating case which accommodates a plurality of processing substrates in a shelf-like form;
- and
- a Z-axis teaching jig provided on or in the vicinity of one of the transfer positions,
- wherein said mapping sensor detects a height of said Z-axis teaching jig so as to perform teaching of Z-axis to said transfer mechanism with respect to the one of the transfer positions.
A transfer positioning method for a substrate processing apparatus which comprises a transfer mechanism arranged on a transfer base and configured to transfer a processing substrate between predetermined transfer positions, and a mapping sensor arranged on the transfer base and configured to detect an arrangement state of a processing substrate inside a processing substrate accommodating case which accommodates a plurality of processing substrate in a shelf-like form, the method comprising:
- providing a Z-axis teaching jig on or in the vicinity of one of the transfer positions;
- and
- detecting by the mapping sensor a height of the Z-axis teaching jig so as to perform teaching of Z-axis to the transfer mechanism with respect to the one of the transfer positions.
Dependencies are inferred from the claim text.