X-ray generator and exposure apparatus having the same
AssigneeCanon Kabushiki Kaisha
InventorAkira Miyake
Life of this patent
Estimating the term…
Abstract
An X-ray generator introducing an X-ray to an illumination optical system includes plural plasma light sources, and a reflector, movably arranged among the plural light sources, for switching light sources and for reflecting the X-ray from one of the plural light sources to the illumination optical system, wherein an angle between a plane determined by an optical axis of the X-ray emitted from the reflector and a line that connects the plural light sources to the reflector, and a polarization plane on which an electric field vector oscillates is between 45° and 135°, the polarization plane maximizing a reflectance to the X-ray of the illumination optical system.
Claims15
An X-ray generator and introducing an X-ray to an illumination optical system, said X-ray generator comprising:
- plural plasma light sources;
- and
- a reflector, movably arranged among said plural light sources, for switching light sources and for reflecting the X-ray from one of said plural light sources to the illumination optical system,
- wherein an angle between a plane determined by an optical axis of the X-ray emitted from said reflector and a line that connects said plural light sources to said reflector, and a polarization plane on which an electric field vector oscillates is between 45° and 135°, the polarization plane maximizing a reflectance to the X-ray of the illumination optical system.
An X-ray generator for generating plasma and introducing an X-ray to a subsequent optical system, said X-ray generator comprising:
- plural light sources for generating the plasma;
- and
- a reflector, movably arranged among said plural light sources, for switching said plural light sources and for reflecting the X-ray to the optical system,
- wherein a plane determined by a line that connects said light sources to said reflector and an optical axis of the X-ray emitted from said reflector varies an angle having an absolute value of 45° or smaller whenever said plural light sources are switched.
An X-ray generator for generating plasma and introducing an X-ray to a subsequent optical system, said X-ray generator comprising:
- plural light sources for generating the plasma;
- and
- a reflector, movably arranged among said plural light sources, for switching said plural light sources and for reflecting the X-ray to the optical system,
- wherein an incident angle of the X-ray from each of the light sources upon said reflector has an absolute value between 0° and 30°.
An X-ray generator for generating plasma and introducing an X-ray to a subsequent optical system, said X-ray generator comprising:
- plural light sources for generating the plasma;
- and
- a reflector, movably arranged among said plural light sources, for switching said plural light sources and for reflecting the X-ray to the optical system,
- wherein an angle of the X-ray from each of the light sources upon said reflector has an absolute value between 0° and 30°.
Dependencies are inferred from the claim text.