Arc evaporation device
OwnerHermann Curtinsinventor
Life of this patent
Estimating the term…
Abstract
An arc evaporation device including a cathode target surrounded by a housing that forms the anode. In order to achieve a uniform evaporation of the target material, several electrically conductive second connections (84, 86) originate from the housing, these connections being linked by a second conductor (74) fixing an envelope having a geometry corresponding to the envelope of the target or that of a first conductor (72), which links the electric connections (76, 78) of the target.
Claims17
Arc evaporation device with a target (16, 49) forming a first pole such as a cathode, which is arranged in a housing (10) forming a second pole such as an anode, wherein the target is connected to a fastener (20) at least peripherally in an electrically conducting manner and wherein from the fastener (20) and/or the target (16) preferably several electrically conducting primary connections (38, 40, 76, 78) extend in the peripheral area of the target, which in turn are connected via an electrically conducting primary conductor (42, 72) leading to a power supply unit (18, 82) arranged outside the housing, with the housing being connected to said unit via at least one electrically conducting secondary connection (44, 46, 49, 53, 54, 84, 86), is characterized in that several electrically conducting secondary connections (46, 48, 52, 54, 84, 86) extend from the housing (10), which are connected among each other via an electrically conducting secondary conductor (44, 70, 74) and fix at least one envelope or at least a partial envelope, whose geometry corresponds to the envelope of the target (16, 49) and/or of envelopes formed by the electrically conducting primary connections (38, 40, 76, 78).
Dependencies are inferred from the claim text.