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US 2006/0137720 A1Published application
Method for the removal of organic residues from finely structured surfaces
AssigneeTechnotrans AG
InventorsMichael Oehler, Rainer Kosters
Life of this patent
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Abstract
Method for removing of organic residues from finely structured surfaces, in which the residues are incinerated by ozone.
Claims9
Method for removing of organic residues from finely structured surfaces, comprising the step of incinerating the residues ozone.
5-8. (canceled)
Dependencies are inferred from the claim text.