Inking process management systems and methods
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorTa-Jen Chiang
Life of this patent
Estimating the term…
Abstract
Systems and methods for inking process management. An inking tool generates inking map data for a first wafer. A first computer connects to an inking tool to receive the inking map data. A second computer connects to the first computer, receives the inking map data from the first computer, generates an inking map record according to the inking map data, stores the inking map record in a storage device, and generates an inking map report for the first wafer according to the inking map record.
Claims18
A system for inking process management, comprising:
- an inking tool generating inking map data for a first wafer;
- a first computer connecting to the inking tool, receiving the inking map data from the inking tool;
- and
- a second computer connecting to the first computer, receiving the inking map data from the first computer, generating an inking map record according to the inking map data, storing the inking map record in a storage device, and generating an inking map report for the first wafer according to the inking map record.
A system for inking process management, comprising:
- an inking tool generating inking map data for a first wafer;
- a first computer connecting to an inking tool, receiving the inking map data from the inking tool;
- and
- a second computer connecting to the first computer, detecting that an inking map record corresponding to the first wafer is absent, acquiring the inking map data by issuing an inking map data request to the first computer, generating an inking map record according to the inking map data, storing the inking map record in a storage device, and generating an inking map report for the first wafer according to the inking map record.
A method of inking process management, comprising using a computer to perform the steps of:
- receiving inking map data from a host computer connected to an inking tool;
- generating an inking map record according to the inking map data;
- storing the inking map record in a storage device;
- and
- generating an inking map report for the first wafer according to the inking map record.
A method of inking process management, comprising using a computer to perform the steps of:
- detecting that an inking map record corresponding to a first wafer is absent;
- acquiring the inking map data by issuing an inking map data request to a host computer connecting to an inking tool;
- generating an inking map record according to the inking map data;
- storing the inking map record in a storage device;
- and
- generating an inking map report for the first wafer according to the inking map record.
Dependencies are inferred from the claim text.