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US 2006/0131991 A1Published application
Surface acoustic wave element
AssigneeMurata Manufacturing Co., Ltd.
InventorTakeshi Kawakami
Life of this patent
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Abstract
A highly reliable surface acoustic wave device includes a low-resistance piezoelectric substrate that is difficult to reoxidize even in a high-temperature atmosphere containing oxygen. The piezoelectric substrate has a specific resistance of about 1.0×107 Ω·cm to about 1.0×1013 Ω·cm, an interdigital electrode on a main surface of the substrate, and a protective film covering the interdigital electrode.
Claims22
1-7. (canceled)
A surface acoustic wave element comprising:
- a piezoelectric substrate having a specific resistance in a range of about 1.0×107 Ω·cm to about 1.0×1013 Ω·cm;
- an interdigital electrode disposed on a main surface of the piezoelectric substrate;
- and
- a protective film covering the interdigital electrode.
1 more element
A surface acoustic wave element comprising:
- a piezoelectric substrate having a specific resistance in the range of about 1.0×107 Ω·cm to about 1.0×1013 Ω·cm;
- an interdigital electrode overlying a main surface of the piezoelectric substrate;
- and
- a protective film underlying the interdigital electrode.
1 more element
Dependencies are inferred from the claim text.