Plasma process for removing excess molding material from a substrate
AssigneeNordson Corporation
InventorsJames Getty, Jiangang Zhao
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Abstract
A method for removing thin layers of a two-component molding material from areas on a substrate. The method includes using a plasma formed using a first gas mixture for removing one component of the molding material and a plasma formed using a different second gas mixture for removing the other component of the molding material. For filled epoxies commonly used as molding materials, the first gas mixture may be an oxygen-rich mixture of an oxygen-containing gas species and a fluorine-containing gas species, and the second gas mixture may be a fluorine-rich mixture of the same gases.
Claims26
A method for removing amounts of a two-component molding material from an area on a substrate, comprising:
- exposing the substrate to a first plasma effective to remove a first component of the molding material from the area with a higher etch rate than a second component of the molding material;
- and
- exposing the substrate to a second plasma effective to remove the second component of the molding material from the area with a higher etch rate than the first component of the molding material.
A method for removing amounts of a two-component molding material from an area on a substrate, comprising:
- generating a first plasma formed from a first gas mixture including a lower concentration by volume of a fluorine-containing gas species than an oxygen-containing gas species;
- exposing the substrate to the first plasma to remove a first component of the molding material from the area at a higher etch rate than a second component of the molding material;
- generating a second plasma formed from a second gas mixture including a higher concentration by volume of the fluorine-containing gas species than the oxygen-containing gas species;
- and
- exposing the substrate to the second plasma to remove the second component of the molding material from the area at a higher etch rate than the first component of the molding material.
Dependencies are inferred from the claim text.