Near field analysis apparatus
AssigneeJasco Corporation
InventorsYoshihito Narita, Shigeyuki Kimura, Fuminori Sato, Atsushi Yamada
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AssigneeJasco Corporation
InventorsYoshihito Narita, Shigeyuki Kimura, Fuminori Sato, Atsushi Yamada
Estimating the term…
A near field analysis apparatus comprising: an irradiation optical system comprising an irradiation-side adjustable optical system for adjusting the position or angle of an optical axis thereof, and irradiating irradiation-side guide light onto an adjustment surface via the irradiation-side adjustable optical system; a light collecting optical system comprising a light-collection-side adjustable optical system for adjusting the position or angle of an optical axis thereof, and irradiating light-collection-side guide light onto the adjustment surface via the light-collection-side adjustable optical system; an irradiation-side adjustment device for adjusting the position or angle of the irradiation-side adjustable optical system such that the spots of the guide light, which are observed at the adjustment surface, match; and a light-collection-side adjustment device for adjusting the position or angle of the light-collection-side adjustable optical system such that the spots of the guide light, which are observed at the adjustment surface, match.
A near field analysis apparatus comprising:
Dependencies are inferred from the claim text.