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OwnerSteven Johnston, Chin-Chang Cheng +1inventors
InventorsSteven Johnston, Chin-Chang Cheng, Soley Ozer
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A method for performing a batch spray comprises providing a substrate mounted upon a turntable, rotating the turntable to revolve the substrate around a center axis of the turntable, rotating the substrate independently of the turntable, wherein the rotating of the substrate occurs simultaneously with the rotating of the turntable, and spraying a chemical onto the substrate from at least one fixed location. Rotating the substrate independently of the turntable allows the entire circumference of the substrate to be exposed to the chemical spray. In one implementation, the substrate may be loaded into a process cassette, the process cassette may be mounted on the turntable, and the process cassette may rotate independently of the turntable while the turntable is rotating.
A method comprising:
A method comprising:
An apparatus comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.