Method of forming branched structures
OwnerVictor Samper, Dong-Kee Yi +1inventors
InventorsVictor Samper, Dong-Kee Yi, Tanu Kustandi
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Abstract
The present invention provides a method of forming a branched structure which comprises applying colloidal-sized particles over structures. The coated structures are then etched such that the structures are etched through the colloidal particles to form branched structures. The etch may be a reactive ion etch. The structures may be microstructures formed as high aspect ratio microstructures. The colloidal-sized particles may be applied as a colloidal solution and a polyelectrolyte (PE) layer may be applied to the microstructures prior to the colloidal solution to promote adsorption of the colloidal particles.
Claims20
A method of forming a branched structure, comprising:
- applying a layer of colloidal-sized particles over structures;
- etching said structures with a medium such that said structures are etched through said particles to form branched structures.
A product for use as an intermediate in forming a branched structure, comprising:
- a plurality of microstructures on a substrate;
- an adsorbed mono-layer of colloidal particles on said microstructures.
A method of forming a branched microstructure, comprising:
- applying a mono-layer of colloidal-sized particles over microstructures;
- etching said structures with a medium such that said microstructures are etched through said particles to form branched microstructures.
Dependencies are inferred from the claim text.