Fabrication of a reflective spatial light modulator
AssigneeMiradia Inc.
InventorsShaoher Pan, Xiao Yang, Dongmin Chen
Life of this patent
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Abstract
Fabrication of a reflective spatial light modulator including a micro-mirror array. In one embodiment, the micro-mirror array is fabricated from a substrate that is a single crystal material by only two main etching steps. A first etch forms cavities in a first side of the material. A second etch forms support post, a vertical hinge, and a mirror plate. Between the first and second etches, the substrate can be bonded to addressing and control circuitry.
Claims24
A method of fabricating a spatial light modulator, the method comprising:
- forming cavities in a first side of a first substrate;
- fabricating electrodes and addressing and control circuitry on a first side of a second substrate;
- then bonding the first side of the first substrate to the first side of the second substrate;
- and
- then forming hinges, connectors, and mirror plates on a second side of the first substrate.
A method of fabricating a plurality of mirror plates of a spatial light modulator for display applications, the method comprising:
- forming a plurality of wells in a first side of a first substrate;
- fabricating addressing and control circuitry and electrodes on a second substrate;
- bonding the first side of the first substrate to the second substrate;
- and
- then processing the second side of the first substrate to release the plurality of mirror plates from the first substrate.
A method of fabricating an array of micro-mirrors for a reflective spatial light modulator, the method comprising:
- forming an array of cavities in a first side of a first substrate;
- fabricating addressing and control circuitry and an array of electrodes on a first side of a second substrate;
- then bonding the first side of the first substrate to the first side of the second substrate;
- and
- then forming the array of micro-mirrors on a second side of the first substrate, wherein the micro-mirrors in the array of micro-mirrors comprise a mirror plate and a hinge.
Dependencies are inferred from the claim text.