Method and apparatus to determine consumable part condition

A system for monitoring a condition of a consumable component in a substrate processing system, comprising:

• at least one consumable component;
• at least one tapered plug including:
• a first axis;
• a second axis intersecting said first axis;
• a top portion having a first width along said first axis;
• a bottom portion having a second width along said first axis;
• and
• at least one sidewall joining said top portion and said bottom portion such that a cross sectional profile of said tapered plug that is substantially parallel to said top and bottom portions and has a cross sectional width that varies according to a location where said cross sectional profile intersects said second axis,
• wherein said at least one tapered plug is inserted into said at least one consumable component such that said top portion is exposed to a processing environment of a plasma processing system.

A method for monitoring a condition of a consumable component in a substrate processing system, comprising:

• inserting at least one tapered plug into at least one consumable component, said tapered plug including:
• a first axis;
• a second axis intersecting said first axis;
• a top portion having a first width along said first axis;
• a bottom portion having a second width along said first axis;
• and
• at least one sidewall joining said top portion and said bottom portion such that a cross sectional profile of said tapered plug that is substantially parallel to said top and bottom portions and has a cross sectional width that varies according to a location where said cross sectional profile intersects said second axis,
• wherein said at least one tapered plug is inserted into said at least one consumable component such that said top portion is exposed to a processing environment of a plasma processing system
• calculating a critical width of each of said at least one tapered plug inserted into said at least one consumable component;
• monitoring said first width of said top portion of each of said at least one tapered plug inserted into said at least one consumable component;
• and
• comparing said critical width to said first width.