Deposition source and deposition apparatus including deposition source
OwnerDo-Geun Kim, Jae-Hong Ahn +3inventors
InventorsDo-Geun Kim, Jae-Hong Ahn, Kwan-Seop Song, Myung-Soo Huh, Seok-Heon Jeong
Life of this patent
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Abstract
A deposition source having a constant deposition rate and high reproducibility, and a deposition apparatus including the deposition source includes: a heating chamber having a linear opening portion; and a cover including a plurality of holes and attached to the linear opening portion of the heating chamber. The distances between the holes formed on the cover vary along a long side direction of the linear opening portion of the heating chamber. The number of holes formed on the cover along a long side direction of the linear opening portion of the heating chamber can also vary.
Claims17
A deposition source, comprising:
- a heating chamber having a linear opening portion;
- and
- a cover including a plurality of holes and attached to the linear opening portion of the heating chamber;
- wherein distances between the holes vary along a long side direction of the linear opening portion of the heating chamber.
A deposition source, comprising:
- a heating chamber having a linear opening portion;
- and
- a cover including a plurality of holes and attached to the linear opening portion of the heating chamber;
- wherein the number of holes arranged in a short side direction of the linear opening portion of the heating chamber varies along a long side direction of the linear opening portion of the heating chamber.
A deposition apparatus comprising a deposition source, including:
- a heating chamber having a linear opening portion;
- and
- a cover including a plurality of holes and attached to the linear opening portion of the heating chamber;
- wherein distances between the holes vary along a long side direction of the linear opening portion of the heating chamber.
A deposition apparatus comprising a deposition source, comprising:
- a heating chamber having a linear opening portion;
- and
- a cover including a plurality of holes and attached to the linear opening portion of the heating chamber;
- wherein the number of holes arranged in a short side direction of the linear opening portion of the heating chamber varies along a long side direction of the linear opening portion of the heating chamber.
Dependencies are inferred from the claim text.