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US 2006/0130764 A1Published application
Susceptor for apparatus fabricating thin film
AssigneeJusung Engineering Co., Ltd.
InventorYong-Chun Quan
Life of this patent
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Abstract
A susceptor for an apparatus fabricating a thin film on a substrate includes a body supported by a supporter therebelow; a laying groove at a top surface of the body; a temperature adjuster in the laying groove; and a cover covering the laying groove.
Claims13
A susceptor for an apparatus fabricating a thin film on a substrate, comprising:
- a body supported by a supporter therebelow;
- a laying groove at a top surface of the body;
- a temperature adjuster in the laying groove;
- and
- a cover covering the laying groove.
2 more elements
A susceptor for an apparatus fabricating a thin film on a substrate, comprising:
- a first body supported by a supporter therebelow;
- a second body disposed on and coupled to the first body;
- a laying groove at one of coupling surfaces of the first and second bodies;
- a temperature adjuster in the laying groove;
- and
- a cover covering the laying groove.
3 more elements
Dependencies are inferred from the claim text.