Method of manufacturing ceramic film and structure including ceramic film
AssigneeFuji Photo Film Co., Ltd.
InventorsYukio Sakashita, Takamichi Fujii
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Abstract
A method of manufacturing a ceramic film by using an AD method, by which a film having good crystallinity can be fabricated without using a high-temperature process. The method of manufacturing a ceramic film by using an aerosol including the steps of: (a) dispersing ceramic raw material powder containing an amorphous component in a gas to generate an aerosol; and (b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing the ceramic raw material powder on the substrate to form a ceramic film.
Claims30
A method of manufacturing a ceramic film by using an aerosol, said method comprising the steps of:
- (a) dispersing ceramic raw material powder containing an amorphous component in a gas to generate an aerosol;
- and
- (b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing said ceramic raw material powder on said substrate to form a ceramic film.
A method of manufacturing a ceramic film by using an aerosol, said method comprising the steps of:
- (a) dispersing ceramic raw material powder containing a component, which produces exothermic reaction by being provided with energy from outside, in a gas to generate an aerosol;
- and
- (b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing said ceramic raw material powder on said substrate to form a ceramic film.
A structure comprising:
- a substrate;
- and
- a ceramic film formed by depositing an aerosol of ceramic raw material powder containing an amorphous component on said substrate.
A structure comprising:
- a substrate;
- and
- a ceramic film formed by depositing an aerosol of ceramic raw material powder containing a component, which produces exothermic reaction by being provided with energy from outside, on said substrate.
Dependencies are inferred from the claim text.