Lateral tunable capacitor and high frequency tunable device having the same

Abstract

A lateral type tunable capacitor and a high frequency tunable device having the same are provided. The high frequency tunable device includes substrate; a signal line formed on the substrate; a plurality of tunable capacitors aligned on both sides of the signal line along the longitudinal direction of the signal line; an electrode disposed on the substrate for applying a DC voltage to the tunable capacitors. The tunable capacitor includes a dielectric layer formed on the substrate, and a first capacitor electrode and a second capacitor electrode formed on both sides of the dielectric layer on the substrate, and the first capacitor electrode, the dielectric layer, and the second capacitor electrode are aligned in parallel on the substrate.

Dependencies are inferred from the claim text.