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AssigneeInternational Business Machines Corporation
InventorsHuilong Zhu, Lawrence Clevenger, Omer Dokumaci, Kaushik Kumar, Carl Radens, Dureseti Chidambarrao
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A novel transistor structure and method for fabricating the same. The transistor structure comprises (a) a substrate and (b) a semiconductor region, a gate dielectric region, and a gate region on the substrate, wherein the gate dielectric region is sandwiched between the semiconductor region and the gate region, wherein the semiconductor region is electrically insulated from the gate region by the gate dielectric region, wherein the semiconductor region comprises a channel region and first and second source/drain regions, wherein the channel region is sandwiched between the first and second source/drain regions, wherein the first and second source/drain regions are aligned with the gate region, wherein the channel region and the gate dielectric region (i) share an interface surface which is essentially perpendicular to a top surface of the substrate, and (ii) do not share any interface surface that is essentially parallel to a top surface of the substrate.
A semiconductor structure, comprising:
A method for fabricating a semiconductor structure, the method comprising the steps of:
A method for fabricating a semiconductor structure, the method comprising the steps of:
Dependencies are inferred from the claim text.