Back to results
US 2006/0124975 A1Published application
Dual work function gate in CMOS device
AssigneeHoneywell International Inc.
InventorMohammed Fathimulla
Life of this patent
Estimating the term…
Abstract
A transistor has a first silicon layer comprising a source region and a drain region separated by a channel region. A gate oxide is formed over the first silicon layer. A second silicon layer is formed over the gate oxide and comprises a dual work function gate. The dual work function gate may include p+ and n+ gate regions such that the transistor has different threshold voltages.
Claims25
A transistor comprising:
- a first silicon layer having a source region and a drain region separated by a channel region;
- a gate oxide formed over the first silicon layer;
- and,
- a second silicon layer formed over the gate oxide, wherein the second silicon layer includes a dual work function gate that provides the transistor with at least first and second voltage thresholds.
1 more element
5-9. (canceled)
A semiconductor device comprising:
- a first silicon layer having first and second electrodes formed therein;
- a gate oxide formed over the first silicon layer;
- and,
- a second silicon layer formed over the gate oxide, wherein the second silicon layer comprises a dual work function gate having differently doped regions of substantially equal areas.
1 more element
14-18. (canceled)
A method of making a transistor comprising:
- forming a buried oxide layer over a first silicon layer;
- forming a second silicon layer over the buried oxide layer such that the second silicon layer includes a source region and a drain region separated by a channel region;
- forming a gate oxide formed over the channel region of the second silicon layer;
- and,
- forming a third silicon layer over the gate oxide such that the third silicon layer includes a dual work function gate having regions of differing conductivity.
2 more elements
(canceled)
A transistor comprising:
- a first silicon layer having a source region and a drain region separated by a channel region;
- a gate oxide formed over the channel region of the first silicon layer;
- and,
- a second silicon layer formed over the gate oxide, wherein the second silicon layer includes a dual work function gate comprising first and second gate regions, wherein the first and second gate regions each has a lateral dimension and a transverse dimension, wherein the lateral dimension extends parallel to the source and drain regions, wherein the transverse dimension extends perpendicularly to the source and drain regions, and wherein the lateral dimension is greater than the transverse dimension.
1 more element
Dependencies are inferred from the claim text.