Anode used for electroplating
AssigneesMetakem Gesellschaft fur Schichtchemie der Metalle mbH, MPC Micropulse Plating Concepts
InventorsJorg Wurm, Stephane Menard
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Abstract
The present invention relates to an anode for electroplating, which has an anode base and a shield and is characterized in that additive degradation is reduced when it is used in electroplating.
Claims19
Anode for electroplating, which comprises an anode base and a shield, wherein the anode base comprises a support material and an active layer, and wherein the shield is attached to the anode base at a distance from it and reduces material transport to and from the anode base.
Anode for electroplating, which has a support material and an active layer, wherein the active layer has two ends and the surface area of the active layer decreases from the one end, which is essentially on top in operation, to the other end, which is essentially underneath in operation.
Dependencies are inferred from the claim text.