Raw solution feeding system for vaporizer and method of cleaning the raw solution feeding system

A raw solution feeding system for a vaporizer characterized by using a monoblock valve therein, wherein the monoblock valve is a valve having a valve V1 which has one passage at one end and two passages at the other end, a valve V2 which has one passage at one end and one passage at the other end and a valve V3 which has one passage at one end and one passage at the other end being formed in one block together with the passages,

• the passage at one end of the valve V1, one passage at the other end of the valve V1, the passage at one end of the valve V2 and the passage at one end of the valve V3 respectively have opening sections A, B, C and D outside the block, and
• the other valve at the other end of the valve V1, the passage at the other end of the valve V2 and the passage at the other end of the valve V3 communicate with each other.

A raw solution feeding system for a vaporizer characterized by using a monoblock valve therein, wherein the monoblock valve is a valve having a valve V1 which has one passage at one end and three passages at the other end, a valve V2 which has one passage at one end and one passage at the other end, a valve V3 which has one passage at one end and one passage at the other end, and a valve V4 which has one passage at one end and two passages at the other end being formed in one block together with the passages,

• the passage at one end of the valve V1, one passage at the other end of the valve V1, the passage at one end of the valve V2, the passage at one end of the valve V4 and one passage at the other end of the valve V4 respectively have opening sections A, C, B, D and E outside the block, and another passage at the other end of the valve V1 communicates with the passage at the other end of the valve V2, still another passage at the other end of the valve V1 communicates with the passage at one end of the valve V3, the passage at the other end of the valve V3 communicates with the other passage at the other end of the valve V4.

A raw solution feeding system for a vaporizer characterized by using a monoblock valve therein, wherein the monoblock valve is a valve having a valve V1 which has one passage at one end and two passages at the other end, a valve V2 which has two passages at one end and one passage at the other end, a valve V3 which has one passage at one end and one passage at the other end, and a valve V4 which has one passage at one end and one passage at the other end being formed in one block together with the passages,

• the passage at one end of the valve V1, one passage at one end of the valve V2, the passage at one end of the valve V3 and the passage at one end of the valve V4 respectively have opening sections E, C, D and B outside the block,
• one passage at the other end of the valve V1 communicates with the passage at the other end of the valve V3, the other passage at the other end of the valve V1 communicates with the passage at the other end of the valve V2, and the other passage at one end of the valve V2 communicates with the passage at the other end of the valve V4, and
• one end of the monoblock valve has an opening section A outside the block, and the other end of the same communicates with a passage which allows the other passage at the other end of the valve V1 to communicate with the passage at the other end of the valve V2.

A method of cleaning a raw solution feeding system for a vaporizer characterized in that a raw solution is prevented from dropping in passages in a valve due to the surface tension, and a purge gas is passed through the passages.