Film formation apparatus
AssigneeFuji Photo Film Co., Ltd.
InventorTsutomu Sasaki
Life of this patent
Estimating the term…
Abstract
A film formation apparatus by which a film thickness can be precisely measured and whether the film quality is good or bad can be confirmed in a process of performing film formation according to the aerosol deposition method. The film formation apparatus includes: an aerosol generating unit for generating an aerosol by dispersing a raw material powder by a gas; a holding unit for holding a substrate on which a structure is to be formed; a nozzle for injecting the aerosol generated by the aerosol generating unit toward the substrate; and a measurement unit for measuring an electric potential of a film formation surface on the substrate.
Claims9
A film formation apparatus comprising:
- aerosol generating means for generating an aerosol by dispersing a raw material powder by a gas;
- holding means for holding a substrate on which a structure is to be formed;
- a nozzle for injecting the aerosol generated by said aerosol generating means toward said substrate;
- and
- measuring means for measuring an electric potential of a film formation surface on said substrate.
Dependencies are inferred from the claim text.