Polishing solutions
Assignee3M Innovative Properties Company
InventorJeffrey Kollodge
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Abstract
A polishing solution containing two different organic acids is described. The first organic acid is a multifunctional amino acid. The second organic acid is selected from a simple carboxylic acid, a hydroxy-carboxylic acid, and combinations thereof. The simple carboxylic acid may be a monofunctional or a multifunctional simple carboxylic acid. Polishing solutions containing two different organic acids providing enhanced removal rates are also described. Methods of polishing surfaces, including metal surfaces comprising copper, are also described.
Claims21
A polishing solution comprising a first organic acid and a second organic acid;
- wherein:
- the first organic acid is a multifunctional amino acid;
- and
- the second organic acid selected from the group consisting of simple carboxylic acids, monofunctional hydroxy-carboxylic acids, and combinations thereof.
A polishing solution comprising a first organic acid and a second organic acid wherein
- (a) the first organic acid is a first multifunctional amino acid and the second organic acid is selected from the group consisting of
- (i) a second multifunctional amino acid;
- (ii) a monofunctional simple carboxylic acid;
- (iii) a multifunctional simple carboxylic acid;
- (iv) a monofunctional hydroxy-carboxylic acid;
- (v) a multifunctional hydroxy-carboxylic acid;
- and
- (vi) combinations thereof;
- or
- (b) the first organic acid is a monofunctional hydroxy-carboxylic acid and the second organic acid is selected from the group consisting of
- (i) a monofunctional simple carboxylic acid;
- (ii) a multifunctional simple carboxylic acid;
- and
- (iii) combinations thereof;
- wherein the removal rate obtained using the polishing solution is greater than the removal rate predicted by a linear estimate based on the removal rate obtained using a polishing solution containing the first organic acid alone and the removal rate obtained using a polishing solution containing the second organic acid alone.
Dependencies are inferred from the claim text.