SPM sensor
AssigneeNanoWorld AG
InventorsOliver Krause, Christoph Lehrer, Silke Petersen
Life of this patent
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Abstract
An SPM sensor (1) for a scanning probe microscope with a cantilever (3), a holding element (2) at one end of the cantilever (3) and a sensor tip (4) at the other end of the cantilever (3) and to a method for producing sensors of this type. The EBD structure (5) is anchored directly in the substrate of the sensor tip (4). The anchoring of the EBD structure (5) takes place with positive and nonpositive engagement in a hole (6) in the sensor tip (4), which is created by material removal in the substrate of the sensor tip (4). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.
Claims7
An SPM sensor (1) comprises a cantilever (3), a holding element (2) at one end of the cantilever (3), a sensor tip (4) at the other end of the cantilever (3) and an at least partially cylindrical EBD scanning tip (5) protruding from the sensor tip (4), wherein the EBD scanning tip (5) is anchored directly in the sensor tip (4).
A method for producing an SPM sensor which comprises a cantilever (3), a holding element (2) at one end of the cantilever (3), a sensor tip (4) at the other end of the cantilever (3) and with an at least partially cylindrical EBD scanning tip (5) protruding from the sensor tip (4), comprising the steps of:
- a) providing an SPM sensor without an EBD scanning tip,
- b) forming a hole in the substrate of the SPM sensor by removing material from the substrate, and
- c) creating an EBD scanning tip by particle beam induced material deposition, wherein the material deposition for creating the EBD scanning tip (5) begins on the bottom of the hole (6) that has been produced, whereby the EBD scanning tip (5) is anchored directly in the substrate of the sensor tip (4).
Dependencies are inferred from the claim text.