Polishing pad conditioner with shaped abrasive patterns and channels
AssigneeApplied Materials, Inc.
InventorsVenkata Balagani, George Lazari, Kenny Ngan
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AssigneeApplied Materials, Inc.
InventorsVenkata Balagani, George Lazari, Kenny Ngan
Estimating the term…
A polishing pad conditioner comprises a base and a pad conditioning face on the base. The conditioning face comprises central and peripheral regions. Abrasive spokes having a substantially constant width of abrasive particles, extend from the central to the peripheral region. The spokes are symmetric and radially spaced apart from one another, and may have a variety of shapes. The conditioning face can also have a cutout inlet channel to receive polishing slurry when the conditioning face is rubbed against a polishing pad, a conduit to receive the polishing slurry from the cutout inlet channel, and an outlet on the peripheral edge of the base to discharge the received polishing slurry.
A polishing pad conditioner comprising:
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A polishing pad conditioner comprising:
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A polishing pad conditioner comprising:
A polishing pad conditioner comprising:
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A polishing pad conditioner comprising:
Dependencies are inferred from the claim text.