Method of manufacturing thin film transistor

Abstract

A method of manufacturing a thin film transistor includes forming a gate electrode on a substrate; forming a gate insulating film on the gate electrode; forming a semiconductor layer on the gate insulating film; forming a bank including a first bank portion and a second bank portion, the first bank portion being located at substantially a central portion of the semiconductor layer, the second bank portion having a thin film portion for surrounding the semiconductor layer and a thick film portion for surrounding the thin film portion at a periphery of the semiconductor layer; arranging first functional liquid containing a conductive material in a region surrounded by the thin film portion and the first bank portion such that the first functional liquid covers the semiconductor layer; drying the first functional liquid to obtain a first conductive film; removing the thin film portion selectively after drying the first functional liquid; arranging second functional liquid including a conductive material on a region from which the thin film portion is removed such that the second functional liquid extends to the first conductive film; and drying the second functional liquid to obtain a second conductive film.

Dependencies are inferred from the claim text.