Waveguide type optical device and manufacturing method thereof

A method of manufacturing a waveguide type optical device comprising:

• an element preparation step of preparing an optical waveguide element;
• a checking step for checking whether the center wavelength of the prepared optical waveguide element can be set to a predetermined value under temperature control in a predetermined temperature range;
• and
• a bonding step of bonding, to the substrate side of an optical waveguide element having judged in the checking step to be incapable of setting the desired value, a support substrate having a predetermined linear expansion coefficient greater than that of the substrate itself of the optical waveguide element.

A method of manufacturing a waveguide type optical device comprising:

• an element preparation step of preparing an optical waveguide element;
• a checking step for checking whether the center wavelength of the prepared optical waveguide element can be set to a desired value under temperature control in a predetermined temperature range;
• a first substrate bonding step of bonding, to the waveguide side of an optical waveguide element judged in the checking step to be incapable of setting the desired value, a first substrate having a linear expansion coefficient greater than that of the substrate itself of the optical waveguide element;
• and
• a second step of bonding, to the substrate side of the optical waveguide element judged in the checking step to be incapable of setting the desired value, a second substrate having a linear expansion coefficient greater than that of the substrate itself of the optical waveguide element.

A method of manufacturing a waveguide type optical device comprising:

• an element preparation step of preparing an optical waveguide element;
• a first substrate bonding step of bonding, to the waveguide side of the optical waveguide element prepared in the element preparation step a first substrate having a linear expansion coefficient greater than that of the substrate itself of the optical waveguide element;
• and
• a second step of bonding, to the substrate side of the optical waveguide element prepared in the element preparation step a second substrate having a linear expansion coefficient greater than that of the substrate itself of the optical waveguide element.

A method of manufacturing a waveguide type optical device comprising:

• an element preparation step of preparing an optical waveguide element;
• a temperature measuring step of measuring a temperature, at which the center wavelength of the prepared optical waveguide element is set to a desired value;
• a support substrate linear expansion coefficient selecting step of selecting the extent, by which the linear expansion coefficient of the support substrate to be bonded to the substrate side of the optical waveguide element is greater than that of the substrate in the optical waveguide element, on the basis of the temperature measured in the ideal temperature measuring step;
• and
• a bonding step of bonding, to the substrate side of the optical waveguide element, a support substrate having the linear expansion coefficient selected in the support substrate linear expansion coefficient selecting step.

A method of manufacturing a waveguide type optical device comprising:

• an element preparation step of preparing an optical waveguide element;
• a temperature measuring step of measuring a temperature, at which the center wavelength of the prepared optical waveguide element is set to a desired value;
• a first/second substrate linear expansion coefficient selecting step of selecting the extent, by which the linear expansion coefficient of the first substrate to be bonded to the waveguide side of the optical waveguide element and the liner expansion coefficient of the second substrate to be bonded to the substrate side of the optical waveguide element are greater than that of the substrate of the optical waveguide element, on the basis of the temperature measured in the ideal temperature measuring step;
• and
• bonding step of bonding the first and second substrates with the linear expansion coefficient selected in the first/second substrate linear expansion coefficient selecting step to corresponding parts of the optical waveguide element.