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US 2006/0078089 A1Published application
X-ray generator and exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorsFumitaro Masaki, Akira Miyake
Life of this patent
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Abstract
An X-ray generator for generating plasma and X-ray emitted from the plasma includes a unit for generating the plasma, and plural reflection optical systems for introducing the X-ray through different optical paths.
Claims13
An X-ray generator for generating plasma and X-ray emitted from the plasma, said X-ray generator comprising:
- a unit for generating the plasma;
- and
- plural reflection optical systems for introducing the X-ray through different optical paths.
Dependencies are inferred from the claim text.