Diffraction gratings for electromagnetic radiation, and a method of production

Abstract

Described are diffraction gratings for electromagnetic radiation and a method suitable for production. The diffraction gratings can be used, in particular, as microspectrometers which can be used in this case in the form of scanning microgratings. In accordance with the object set, they are to be made available as efficient diffraction gratings in miniaturized form and to be able to be produced cost-effectively and in large piece numbers. In the case of the diffraction gratings, there is constructed on a surface of a substrate a surface structure which is formed from equidistantly arranged linear structural elements aligned parallel to one another. Moreover, the entire surface of the substrate and of the structural elements is coated with at least one further layer, which forms a uniform surface contoured in the shape of a wave and having alternatively arranged wave peaks and wave troughs.

Dependencies are inferred from the claim text.