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US 2006/0077533 A1Published application
Method and system for packaging a MEMS device
AssigneeIdc, LLC
InventorsMark Miles, Jeffrey Sampsell, Lauren Palmateer, Brian Arbuckle, Philip Floyd
Life of this patent
Estimating the term…
Abstract
A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.
Claims61
A display, comprising:
- a transparent substrate;
- an array of interferometric modulators configured to reflect light through said transparent substrate;
- a backplate sealed to said transparent substrate and providing a cavity for said interferometric modulators;
- and
- electronic circuitry located on said backplate and in electrical connection with the array of interferometric modulators.
2 more elements
A device having a display, comprising:
- a transparent substrate;
- an array of interferometric modulators configured to reflect light through said transparent substrate;
- and
- a backplate sealed to said transparent substrate and providing a cavity for said interferometric modulators, wherein said backplate comprises electronic circuitry configured to control said interferometric modulators.
1 more element
A method of manufacturing a display device, comprising:
- providing a transparent substrate comprising an array of interferometric modulators;
- providing a backplate comprising electronic circuitry configured to control said array of interferometric modulators;
- sealing said transparent substrate to said backplate so that a cavity is formed above said array of interferometric modulators, and wherein said electronic circuitry is placed in electrical communication with said array of interferometric modulators.
A display, the process of manufacturing said display comprising:
- providing a transparent substrate comprising an array of interferometric modulators;
- providing a backplate comprising electronic circuitry configured to control said array of interferometric modulators;
- sealing said transparent substrate to said backplate so that a cavity is formed above said array of interferometric modulators, and wherein said electronic circuitry is placed in electrical communication with said array of interferometric modulators.
A display, comprising:
- means for modulating light and reflecting it towards a viewer;
- a first means for supporting said modulating means;
- means for controlling the state of said modulation means;
- a second means for supporting said controlling means and providing a cavity for said modulating means.
1 more element
A display for an electronic device, comprising:
- a first transparent substrate;
- a first array of interferometric modulators configured to reflect light through said first transparent substrate and in a first direction;
- a backplate sealed to said first transparent substrate and providing a cavity for said first array of interferometric modulators, wherein said backplate comprises electronic circuitry configured to control said first array of interferometric modulators;
- a second transparent substrate sealed to said backplate, wherein said second transparent substrate comprises a second array of interferometric modulators configured to reflect light in a second direction, and wherein said first direction and said second direction are opposite directions.
1 more element
A display for an electronic device, comprising:
- a first transparent substrate;
- a first array of interferometric modulators configured to reflect light through said first transparent substrate and in a first direction;
- a backplate sealed to said first transparent substrate and providing a cavity for said first array of interferometric modulators, wherein said backplate comprises electronic circuitry configured to control said first array of interferometric modulators
- a second transparent substrate sealed to said first backplane, wherein said second transparent substrate comprises a second array of interferometric modulators configured to reflect light in a second direction, and wherein said first direction and said second direction are opposite directions.
1 more element
A device having a display, comprising:
- a first transparent substrate;
- a first array of interferometric modulators configured to reflect light through said first transparent substrate;
- a second transparent substrate opposed to said first transparent substrate;
- and
- a second array of interferometric modulators configured to reflect light through said second transparent substrate.
2 more elements
A method of manufacturing a display, comprising:
- providing a first transparent substrate comprising a first array of interferometric modulators;
- providing a second transparent substrate comprising a first array of interferometric modulators;
- providing a backplate comprising electronic circuitry configured to control the state of said first and second arrays of interferometric modulators;
- sealing said first transparent substrate to said backplate;
- sealing said second transparent substrate to said backplate;
- and
- placing said electronic circuitry in electrical connection with said first and second arrays of interferometric modulators.
4 more elements
A display, the process of manufacturing said display comprising:
- providing a first transparent substrate comprising a first array of interferometric modulators;
- providing a second transparent substrate comprising a first array of interferometric modulators;
- providing a backplate comprising electronic circuitry configured to control the state of said first and second arrays of interferometric modulators;
- sealing said first transparent substrate to said backplate;
- sealing said second transparent substrate to said backplate;
- and
- placing said electronic circuitry in electrical connection with said first and second arrays of interferometric modulators.
4 more elements
A display, said display comprising
- a first means for modulating light and reflecting it towards a viewer;
- a first means for supporting said first modulating means;
- a second means for modulating light and reflecting it towards a viewer;
- a second means for supporting said second modulating means
- means for controlling the state of said first and second modulation means;
- and
- a third means for supporting said controlling means.
4 more elements
A micro-electro-mechanical (MEM) device comprising:
- a substrate comprising a plurality of MEM elements;
- a backplate comprising a shaped region and a substantially planer perimeter region, wherein said backplate comprises a plurality of conductive paths that provide electrical connectivity to the MEM elements;
- and
- at least one electrical component electronically coupled to at least one of the conductive paths.
1 more element
Dependencies are inferred from the claim text.