Method of fabricating a free-standing microstructure
AssigneeIdc, LLC
InventorsClarence Chui, Jeffrey Sampsell
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Abstract
Provided is a MEMS device comprising an integrated post and deformable layer. In some embodiments, the transition between the post and deformable layer comprises substantially a single arcuate or convex surface, thereby providing a mechanically robust structure. Some embodiments provide a method for fabricating a MEMS device comprising the use of a self-planarizing sacrificial material, which provides a surface conducive to the formation of a relatively uniform deformable layer thereon.
Claims37
A method for fabricating a microelectromechanical systems device comprising:
- forming a conductive layer over a first sacrificial layer;
- patterning a movable conductor from the conductive layer;
- and
- forming a planar layer of a second sacrificial layer over the movable conductor and first sacrificial layer.
A microelectromechanical systems device comprising:
- a movable conductor formed over a first sacrificial layer, and a planar second sacrificial layer formed over the movable conductor and the first sacrificial layer.
A method for fabricating an interferometric modulator comprising:
- forming a first sacrificial layer;
- forming a mirror layer over the first sacrificial layer;
- patterning the reflective layer to form a mirror;
- and
- spinning-on a second sacrificial layer over the mirror and the first sacrificial layer.
An interferometric modulator comprising:
- a substrate;
- a deformable layer;
- a plurality of posts extending between the substrate and the deformable layer, wherein the posts and deformable layer are integrated;
- an optical stack formed on the substrate proximal to the deformable layer;
- a movable mirror disposed between the optical stack and the deformable layer;
- a connector securing the movable mirror to the deformable layer;
- and
- a transition between a post and the deformable layer comprising substantially a single arcuate surface.
An apparatus comprising:
- a substrate;
- a deformable layer;
- means integrated with the deformable layer for supporting the deformable layer;
- a movable conductor disposed between the substrate and the deformable layer;
- and
- a connector securing the movable conductor to the deformable layer.
Dependencies are inferred from the claim text.