Open hole-based diffractive light modulator

An open hole-based diffractive light modulator, comprising:

• a base member;
• a plurality of first reflective parts arranged to form an array, each of which is:
• spaced apart at an intermediate portion thereof from the base member so as to form a space therebetween;
• each of which is supported by the base member, each of which has a reflective surface directed away from the base member to reflect incident light;
• and each of which has at least one hole formed so as to pass the incident light therethrough;
• a second reflective part located between the first reflective part and the base member so as to define a space relative to the upper reflective part and which has a reflective surface to reflect the incident light passing through the open holes;
• and
• a plurality of actuating units for moving the intermediate portion of a corresponding first reflective part to change the intensity of diffracted light which is formed using light reflected from the first reflective part and the second reflective part.

A display device using an open hole-based diffractive light modulator, comprising:

• a light source emitting light;
• the open hole-based diffractive light modulator which modulates incident light to generate diffracted light, comprising:
• a base member;
• a plurality of first reflective parts arranged to form an array, each supported by the base member so as to form spaces between intermediate portions of the first reflective parts and the base member and each first reflective part has open holes formed, so as to pass the light therethrough, and a reflective surface to reflect the incident light;
• a second reflective part supported by the base member, said second reflective part spaced apart from the first reflective parts, said second reflective part comprising a reflective surface to reflect the incident light passing through the open holes of the first reflective parts;
• and
• a plurality of actuating units for moving the intermediate portions of the corresponding first reflective parts relative to a second reflective part to change the intensity of the diffracted light which is formed using light reflected from the first reflective parts and the second reflective parts;
• a light optical part for applying the incident light emitted from the light source to the open-hole based diffractive light modulator;
• a filtering optical part for selecting the desired orders of diffracted light from diffracted light which is modulated by the open-hole based diffractive light modulator so as to pass the selected diffracted light therethrough;
• and
• a projection and scanning optical part for scanning the diffracted light which pass through the filtering optical part on a screen.

A printing device using an open hole-based diffractive light modulator, comprising:

• a light source emitting light;
• the open hole-based diffractive light modulator which modulates incident light to generate diffracted light, comprising:
• a base member;
• a plurality of first reflective parts, arranged to form an array, each supported by the base member to form spaces between intermediate portions thereof and the base member, and each of said first reflective parts having at least one open hole formed so as to pass the light therethrough and a reflective surface facing away from the base member to reflect the incident light;
• a second reflective part supported by the base member, said second reflective part being spaced apart from the first reflective parts the second reflective part, said second reflective part comprising a reflective surface to reflect the incident light passing through the open holes;
• and
• a plurality of actuating units for moving the intermediate portions of the corresponding first reflective parts to change intensity of the diffracted light which is formed using light reflected from the first reflective parts and the second reflective part,
• a light optical part for applying the incident light emitted from the light source to the open-hole based diffractive light modulator;
• a filtering optical part for selecting the desired orders of diffracted light from diffracted light which is modulated by the open-hole based diffractive light modulator so as to pass the selected diffracted light therethrough;
• and
• a projection optical part for projecting the diffracted light which passes through the filtering optical part on a drum.

An open hole-based diffractive light modulator, comprising:

• a substrate;
• an insulating layer disposed on the substrate;
• at least one sacrificial layer which is disposed on the insulating layer;
• a reflective part disposed on the insulating layer, said reflective part positioned to reflect incident light;
• a support which is provided on the at least one sacrificial layer and through which first open holes are formed;
• a micromirror disposed on the support, said micromirror having a reflective surface to reflect the incident light, second open holes formed in the micromirror to correspond to the first open holes to pass the incident light therethrough;
• and
• at least one actuating unit to move an intermediate portion of the support when voltage is applied thereto, thereby changing intensity of diffracted light which is formed using light reflected from the micromirror and the reflective part.