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US 2006/0077525 A1Published application
Micromirror array devices with light blocking areas
AssigneeTexas Instruments Incorporated
InventorAndrew Huibers
Life of this patent
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Abstract
Disclosed herein is a micromirror array device package having a light blocking area for reducing unexpected light scattering from the surfaces of the posts.
Claims59
A method of making a micromirror array device, comprising:
- providing a substrate;
- forming an array of light blocking pads on the substrate;
- depositing a sacrificial material on the substrate;
- forming an array of mirror plates and hinges on the sacrificial material and an array of posts extending from the hinges to the substrate with at least one of the posts being supported by one of the light blocking pads;
- and
- removing the sacrificial material such that the mirror plates are movable relative to the substrate.
3 more elements
A micromirror array device, comprising:
- a substrate;
- an array of light blocking pads on the substrate;
- an array of mirror plates attached to an array of hinges;
- and
- an array of posts extending from the hinges to the substrate with at least one of the posts being supported by one of the light blocking pads.
2 more elements
Dependencies are inferred from the claim text.